Repeatability and TIS results are reasonable and SEM-OVL has good correlation with Opt-OVL. In collaboration between imec and Hitachi High-Technologies, we evaluated repeatability, TIS of SEM-OVL as well as correlation between SEM-OVL and Opt-OVL in the and process. This time, in order to measure overlay after lithography, we evaluated the see-through overlay using high voltage SEM CV5000 released in October 2016. Then, we evaluated overlay of the same layer pattern after etching. Meanwhile, since 2006, we have been working on SEM based overlay measurement and developed overlay measurement function of the same layer using CD- SEM. We measured overlay with analysis SEM called Miracle Eye which can output ultrahigh acceleration voltage in 1998.
The miniaturization of semiconductors continues, importance of overlay measurement is increasing. Hasumi, Kazuhisa Inoue, Osamu Okagawa, Yutaka Shao, Chuanyu Leray, Philippe Halder, Sandip Lorusso, Gian Jehoul, Christiane SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM Modified UMLS, modified SemRep and SemMedDB-UTH – these are resources (UMLS, SemMedDB-UT) and tools ( SemRep) created and maintained by National Library of Medicine that we have modified for personalized cancer therapy and returned to the NLM. Modified UMS, Modified SemRep and SemMedDB-UTH | Informatics Technology for Cancer Research (ITCR) 31 Planetary and Earth Science Laboratory. PHOTOMICROPHOTOGRAPHY -GEOLOGY ( SEM) High magnification and resolution views of lunar, meteorite and terrestrial materials using the Scanning Electron MIcroscope ( SEM), Bldg.
The book illustrates the successes and challenges… This collection, which has appeared in SEM Monthly over the past year, chronicles Strategic Enrollment Management efforts at campuses nationwide. The " SEM Anthology" is a compilation of articles by more than 30 enrollment management professionals from a variety of institutions across the country.
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